FLS110 Mass Flow Sensor

Features

  • Small footprint: 3.5 mm x 3.5 mm.
  • Repeatability: 0.5 sccm +0.5% measured value.
  • Measures flow to 500 slm or more.
  • Fully temperature-compensated for a reliable flow signal.
  • Configurable operational modes and features.

 

Description

Description

Digital flow sensing solutions with FLS110

The FLS110 has two analogue sensing elements integrated in a MEMS die: a tungsten wire for sensing flow and a temperature sensor. Firmware provided by Flusso, running on a standard microcontroller, drives the sensing elements, digitises their response to mass flow through the FLS110 and calculates readings for:
• Flow temperature
• Mass flow – using the principle of hot-wire anemometry
• Volumetric flow or differential pressure (DP) – when given flow pressure by the host application

The FLS110 firmware can also be compiled and linked with application code to run on a single, shared microcontroller.

The application then uses API calls instead of the serial interface. By virtue of system-level flow characterisation during end-product development, or calibration of individual product units, FLS110 firmware calculates and reports system flow, i.e., not just the flow through the bypass and FLS110 itself.

Calibration functions supported in the firmware enable straightforward optimisation of FLS110 flow sensing algorithms to your system characteristics and sensing accuracy requirements.

Refer to Developing Your Flow Sensing Solution with FLS110 for a more extensive overview of FLS110 flow sensing solutions and how you can rapidly implement them in your product design.

 

Datasheet

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